RPDG-200 Pulsed DC Generator
The RPDG-200 is a 20.0 kW Asymmetric Bipolar Pulsed DC system that enables deposition of a wide variety of low defect insulating films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN. RPDG generators provide asymmetric bipolar and unipolar pulsed DC power for reactive PVD (Physical Vapor Deposition), CVD (Chemical Vapor ...
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